Photolithography at a wavelength of 193 nm in the deep UV with water immersion lenses can now produce microelectronics containing features with a half-pitch as small as 40 nm. The big question is ...
This pattern can then guide further processes, such as etching or doping, to create the final microstructures. Photolithography offers high precision, repeatability, and the ability to fabricate ...
Extreme ultraviolet lithography extends photolithography to much shorter wavelengths and is a cost-effective method of producing more-advanced integrated circuits. Although some infrastructure ...
Description: application shown is the introduction of a laser into a photolithography tool used for interferometry measurements. Interferometers are used to accurately control stage movement for the ...
WDI's Laser Auto-Focus ATF6 sensor is an active optical device (incorporating a class II semiconductor laser) designed to provide focusing servo systems with fast feedback signals needed to quickly ...