The case of photolithographic defects, which are of the same dimensions as the integrated circuit device and interconnection patterns, is dealt with in the remainder of the paper. The relationships ...
Abstract: The availability of very fast semiconductor switching devices and the possibilities of large scale integration ... represents a fundamental boundary which limits the ultimate speed of logic ...
Electronic devices are usually small and can be grouped together into packages called integrated circuits. This miniaturization is central to the modern electronics boom. An electrochemical ...